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ABM, Inc. | Precision Alignment Systems
- Substrate To Mask, Mask to Mask, Substrate To Substrate
- Interchangeable Vacuum Mask Holders Up to 17"
- Interchangeable Vacuum Chucks For Substrates Up To 16" Square, .3" Thick. Fixed Level And Planarizing Configurations, Fixed Or Removable Substrate Pre-Alignment
- Chuck Motions: Micrometer Driven X, Y, & Theta, Precision Z Adjust (for fine gap settings), Differential Micrometer Option With (coarse/fine motion)
- Pneumatic Controls: On/Off, Substrate, Mask, Adjustable Contact, & Ball Lock Vacuum (for planarizing chucks), Adjustable N2 Purge, Mask Frame (up/down)
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